| 摘要 |
<p>PURPOSE:To set materials to be treated of various sizes on a treating stage, by establishing a spacing of a reference piece which holds a part nearby an edge part of each material to be treated by operating a drive device. CONSTITUTION:Both motors 15 are operated simultaneously so as to allow the position of a movable reference piece 12 to be in accord with the size of a material 5 to be treated and pole nuts 14 are moved by rotating both pole screws 13 to displace the movable reference piece 12. In such a case, as a pneumatic source is connected to slots 22 for sticking by vacuum suction at the lower face of the movable reference piece 12, the resultant action of its pneumatic force permits a fluid bearing to be formed between the movable reference piece 12 and a treating stage 1. The amount of movement of the movable reference piece 12, that is, its position is determined by an instruction value given to the motors 15 and it stops at a position determined according to the size of the material 5 to be treated. Then, the slots 22 for sticking by vacuum suction are connected to a vacuum source and then the material 5 to be treated is set out after making the movable reference piece 12 come closely into contact and also fixing to the upper face of the treating stage 1.</p> |
