MANUFACTURE OF SILICON NITRIDE FILM,申请号JP19880011110-传众专利搜索

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发明名称	MANUFACTURE OF SILICON NITRIDE FILM
摘要
申请公布号	JPH01185926(A)	申请公布日期	1989.07.25
申请号	JP19880011110	申请日期	1988.01.20
申请人	NEC CORP	发明人	MAEDA AKIYOSHI
分类号	H01L21/318	主分类号	H01L21/318
代理机构		代理人
主权项
地址

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