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发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPH0236527(A)
申请公布日期
1990.02.06
申请号
JP19880185627
申请日期
1988.07.27
申请人
HITACHI LTD;HESCO
发明人
SUZUKI KAZUO;SONOBE TADASHI
分类号
H01L21/302;H01L21/205;H01L21/3065;H01L21/31
主分类号
H01L21/302
代理机构
代理人
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