SUBSTRATE INSPECTION APPARATUS USING ELECTRON BEAM,申请号JP19880195115-传众专利搜索

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发明名称	SUBSTRATE INSPECTION APPARATUS USING ELECTRON BEAM
摘要
申请公布号	JPH0244266(A)	申请公布日期	1990.02.14
申请号	JP19880195115	申请日期	1988.08.03
申请人	NEC CORP	发明人	UKITA AKIO
分类号	G01R31/02	主分类号	G01R31/02
代理机构		代理人
主权项
地址

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