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发明名称
Focusing apparatus of electron microscope
摘要
申请公布号
US4933553(A)
申请公布日期
1990.06.12
申请号
US19890319670
申请日期
1989.03.07
申请人
HITACHI KK;HITACHI NAKA SEIKI KK
发明人
TOMIZAWA, JUNICHIRO;OZASA, SUSUMU
分类号
H01J37/153;H01J37/21
主分类号
H01J37/153
代理机构
代理人
主权项
地址
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