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发明名称
SUPPLYING METHOD FOR VAPOR DEPOSITION MATERIAL
摘要
申请公布号
JPH02250957(A)
申请公布日期
1990.10.08
申请号
JP19890070827
申请日期
1989.03.23
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
INOUE ISAMU;TAKEGAWA HIROZO;AKUTAGAWA RYUTARO;SHINTAKU HIDENOBU;KODAMA KAYOKO
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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