| 摘要 |
PURPOSE:To obtain an ITO sintered body of a high density of a sintered density of 5.3g/cm<3> or more and a resistivity of 2X10<-3>OMEGA.cm or less by using ITO powder or primary particle size of 1 micrometer or less, BET surface area of 15m<2>/g or more, and specific surface area obtained from particle size distribution of 2m<2>/g or more as raw material for the sintered body. CONSTITUTION:Indium oxide powder and ITO powder having fine particle size and highly dispersed or not coagulated, of a specific surface area obtained from the particle size distribution of 2m<2>/g or more, preferably 3.5m<2>/g or more are used. As a result of considerable volumetric contraction due to reduction in the number of pores in the sintered body during the sintering reaction, the sintered body becomes of a high density and low resistance. This provides a high density sintered body of a resistivity of 2X10<-3>-2X10<-4>OMEGA.cm, mostly 1X10<-3>-2X10<-4>OMEGA.cm, and a sintered density of 5.3g/cm<3> or more, mostly 6g/cm<3> or more. |
