| 摘要 |
<p>PURPOSE:To prevent a semiconductor substrate from slipping down from a carrier by providing a stopper which is operated manually. CONSTITUTION:A stopper 4 is attached to a port of a substrate 8 of a carrier 1 through a hinge 7, whereto a partition 2 to contain the semiconductor substrate 8 is provided. If the stopper 4 which returns by a spring 5 is folded to the side of the carrier 1 manually, the substrate 8 can be taken in and out the carrier 1 of the substrate 8. With the stopper, it is possible to prevent a semiconductor substrate from slipping down from a carrier due to impact, etc.</p> |
