MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19900215544-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH0497519(A)	申请公布日期	1992.03.30
申请号	JP19900215544	申请日期	1990.08.15
申请人	NEC CORP	发明人	AOYAMA TORU
分类号	C23C16/04;C23C16/24;H01L21/205;H01L21/28;H01L21/285	主分类号	C23C16/04
代理机构		代理人
主权项
地址

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