SOLAR CELL ELEMENT AND METHOD FOR PRODUCING THE SAME, AND SOLAR CELL MODULE

摘要

Provided is a solar cell element comprising a semiconductor substrate which has a p-type semiconductor region, wherein one or more surface layer-internal regions which have Si—O bonds are formed in the surface layer part of the p-type semiconductor region and a passivation layer is formed on the surface layer-internal regions. Also provided is a solar cell module comprising the solar cell element. A method for producing a solar cell element is further provided, said method comprising: a substrate preparation step for preparing a semiconductor substrate which has a p-type semiconductor region; a surface treatment step for exposing the surface of the p-type semiconductor region to plasma produced using an oxygen-containing gas, and forming surface layer-internal regions which have Si—O bonds in the surface layer part of the p-type semiconductor region; and a layer formation process for forming a passivation layer on the surface layer-internal regions.