发明名称 CONNECTING METHOD FOR INTEGRATED CIRCUIT ELEMENT
摘要 PURPOSE:To instantaneously harden an anisotropically conductive material, to prevent the viscosity of an adhesive from being dropped suddenly and to prevent air bubbles from being generated in a connecting part by a method wherein conductive particles are resin dispersed into an electron-beam hardening type insulating adhesive resin, they are compression-bonded to a bonding region at a mounting operation and, after that, they are irradiated with an electron beam. CONSTITUTION:The surface of an electrode pad 4 for an IC chip 3 is cleaned; the surface of the IC chip 3 including the electrode pad 4 is coated with an anisotropically conductive material whose conductive particles 1 have been dispersed into an electron- beam hardening type insulating adhesive resin 2. In addition, the surface including an electrode terminal 6 of a glass substrate 5 is coated with the adhesive resin 2 containing the conductive particles 1. Then, the electrode pad 4 is faced with the electrode terminal 6; the IC chip 3 is placed on the glass substrate 5; a load is exerted; and the IC chip 3 is pressed down; the electrode pad 4 is compression-bonded to the electrode terminal 6. At the same time, an electron beam 7 is applied from the transverse direction and from the rear direction of the glass substrate 5; the resin 2 applied between the IC chip 3 and the glass substrate 5 is hardened; and the IC chip 3 is bonded to the glass substrate 5.
申请公布号 JPH04317347(A) 申请公布日期 1992.11.09
申请号 JP19910111049 申请日期 1991.04.16
申请人 NEC CORP 发明人 MATSUI KOJI
分类号 H01L21/52;H01L21/60;H05K3/32 主分类号 H01L21/52
代理机构 代理人
主权项
地址