| 摘要 |
PURPOSE:To sufficiently wash an object to be washed such as a quartz tube within a short time. CONSTITUTION:A washing apparatus is equipped with a washing tank 1 having an opening part provided to the upper part thereof and also having drain ports 5a, 5b respectively provided to the bottom surface 4 thereof, rotary mechanisms 3, 3 holding a quartz tube in the washing tank 1 to rotate the same and the water injection pipe 2b horizontally arranged to the upper part of the washing tank 1. The injection amount of water of the water injection pipe 2b is set so as to be larger than the drain amount from the drain port 5a, 5b so that pure water overflows from the upper opening of the washing tank 1. The flow area of the drain ports provided to the bottom surface 4 of the washing tank is set so that the total area of the drain hole 5a of the side edges of the washing tank are made larger than that of the drain ports 5b of the central part thereof in order to accelerate the flow of pure water of the side edge parts of the washing tank. |
