Contactless spatial position measurement in robot processing chamber - acquiring images of robotic actuator with defined marking enabling calibration of imaging units in coordinate system

摘要

In the method, images of a robotic actuator are converted into computer processable form. The units are calibrated using the known positions and images of the chamber are acquired and marked points are spatially associated with the corrdinates in the robotic coordinate system. The robotic actuator has a marking which enables a definite location of the marking in the images acquired by the different image acquisition units and determination of its position relative to the robotic coordinate system. The units are calibrated by defining actuator positons with known coordinates. USE/ADVANTAGE - For use in complex manufacturing cells. Robot itself generates matching points for calibration of image acquisition units.