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发明名称
CUBIC BORON NITRIDE SUBSTRATE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH04354115(A)
申请公布日期
1992.12.08
申请号
JP19910155779
申请日期
1991.05.30
申请人
SUMITOMO ELECTRIC IND LTD
发明人
TOMIKAWA TADASHI;FUJITA NOBUHIKO;TODA NAOHIRO;NAKAYAMA AKIRA
分类号
C30B29/38;H01L21/02
主分类号
C30B29/38
代理机构
代理人
主权项
地址
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