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发明名称
FABRICATION OF WIRING
摘要
申请公布号
JPH0513586(A)
申请公布日期
1993.01.22
申请号
JP19910159049
申请日期
1991.06.28
申请人
NIKKO KYODO CO LTD
发明人
SEKIDA KOICHI
分类号
H01L21/3205;H01L21/768;H05K3/06;H05K3/24
主分类号
H01L21/3205
代理机构
代理人
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