发明名称 POLYIMIDE MULTILAYER WIRING SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME
摘要 A polyimide multilayer wiring substrate that comprises a plurality of wiring layer blocks, each of which including a plurality of polyimide wiring layers, which are electrically connected and formed into a single body by means of an anisotropic conductive film that is inserted between adjacent blocks, the multiple wiring substrate being manufactured by inserting said anisotropic conductive film between adjacent blocks and compressing and heating the blocks and layer of film so as to form them into a single body. This process of inserting, compressing and heating is repeated N times to provide a layered structure comprising N pieces of wiring layer blocks. <IMAGE>
申请公布号 CA2074648(A1) 申请公布日期 1993.01.27
申请号 CA19922074648 申请日期 1992.07.24
申请人 NEC CORPORATION 发明人 ISHIDA, HISASHI
分类号 H01L21/48;H01L21/68;H01L23/538;H05K1/03;H05K3/00;H05K3/28;H05K3/32;H05K3/40;H05K3/46;(IPC1-7):H05K1/02 主分类号 H01L21/48
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