POWER SUPPLY SYSTEM, PLASMA PROCESSING APPARATUS AND POWER SUPPLY CONTROL METHOD

摘要

A power supply system includes a high frequency power supply which supplies a high frequency power; a DC power supply which supplies a first negative DC voltage or a second negative DC voltage having an absolute value larger than that of the first DC voltage; and a control unit which performs a power supply control process of repeating a supply and a stop of the supply of the high frequency power alternately; stopping supplies of the first and second DC voltages for a first period, which is a time period from a beginning of the supply of the high frequency power within a period during which the high frequency power is being supplied; supplying the first DC voltage for a second period except the first period within the period; and supplying the second DC voltage for a period during which the supply of the high frequency power is stopped.

主权项

1. A power supply system, comprising:
a first high frequency power supply configured to supply a high frequency power for plasma generation to a lower electrode configured to mount a processing target object thereon; a DC power supply configured to supply a first negative DC voltage or a second negative DC voltage having an absolute value larger than that of the first DC voltage to an upper electrode provided to face the lower electrode; and a control unit configured to perform a power supply control process of repeating a supply of the high frequency power and a stop of the supply of the high frequency power alternately; stopping a supply of the first DC voltage and a supply of the second DC voltage for a first period, which is a time period from a beginning of the supply of the high frequency power within a period during which the high frequency power is being supplied; supplying the first DC voltage for a second period except the first period within the period during which the high frequency power is being supplied; and supplying the second DC voltage for a period during which the supply of the high frequency power is stopped.