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发明名称
EVALUATING METHOD FOR SOLID-STATE IMAGE SENSOR
摘要
申请公布号
JPH05102451(A)
申请公布日期
1993.04.23
申请号
JP19910263529
申请日期
1991.10.11
申请人
MATSUSHITA ELECTRON CORP
发明人
TANAKA TOMOYA;NAKAYAMA HIROSHI
分类号
H01L21/66;H01L27/14
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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