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发明名称
SEMICONDUCTOR DEVICE FOR TESTING AND ITS TESTING METHOD
摘要
申请公布号
JPH05308094(A)
申请公布日期
1993.11.19
申请号
JP19920111829
申请日期
1992.04.30
申请人
KAWASAKI STEEL CORP
发明人
YAMAZAKI TORU
分类号
G01R31/26;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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