发明名称 |
METHOD FOR THE SURFACE TREATMENT OF A METAL BY ATMOSPHERIC PRESSURE PLASMA |
摘要 |
This invention provides a method for the surface treatment of a metal, which comprises the steps of: placing at least a surface to be treated of a metal to be treated between two electrodes facing each other under an atmosphere of a mixed gas consisting of an inert gas and a reactant gas; and plasma exciting said mixed gas under atmospheric pressure to effect glow discharge between said electrodes. The method of the present invention uses an apparatus simpler than that used in a conventional method and can inject into the surface layer of a metal, even those elements which have been difficult to with the conventional method, and can readily modify surface properties of a metal such as surface hardness, surface wettability, etc.
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申请公布号 |
CA2091647(A1) |
申请公布日期 |
1994.03.05 |
申请号 |
CA19932091647 |
申请日期 |
1993.03.15 |
申请人 |
NISHIWAKI, ATSUSHI;E.C. CHEMICAL CO., LTD.;C. ITOH FINE CHEMICAL CO., LTD. |
发明人 |
NISHIWAKI, ATSUSHI;IKEMIYA, NORIHITO;UCHIYAMA, HIROSHI;INAGAKI, HIDEO;SAWADA, YASUO;OGINO, KAZUMI |
分类号 |
C23C16/50;C23C8/36;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23C8/06;B01J19/08 |
主分类号 |
C23C16/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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