| 摘要 |
PURPOSE:To lessen the generation of the oxygen generated from pellets when the pellet are melted at the time of vapor deposition so that melting time and eventually he time required for a vapor deposition operation are shortened and that a stably vapor deposited film and high film strength are obtd. by mixing metal tantalum or metal zirconium at ratios of a specific range into zirconium dioxide. CONSTITUTION:The material for vapor deposition is formed by mixing the zirconium dioxide and the metal tantalum or the metal zirconium. The pellet-like material for vapor deposition is formed by mixing these materials at the ratios in which the weight of the metal tantalum or the metal zirconium is 2 to 25% of the total weight of the mixture and subjecting the mixture to a heat treatment in an inert atmosphere at such a high temp. that the mixture can be sintered. The zirconium dioxide, metal tantalum and metal zirconium to be used are preferably in a powdery form of adequate grain sizes to facilitate sintering. These materials are preferably previously mixed prior to sintering. |
