| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for measuring a shape that can accurately and easily determine the front surface height, the back surface height of a specific part of a transparent plate to be measured, and the absolute value of the thickness of the plate.SOLUTION: The wavelength of an illumination light from an illumination light source is temporally scanned, an interference figure is continuously imaged by imaging means while the interference figure is being changed, and a predetermined model function is applied to an interference brightness signal obtained by the imaging, whereby at least one of the front surface height and the back surface height of each part of a measurement sample and the plate thickness distribution is measured.SELECTED DRAWING: Figure 1 |
