发明名称 |
Method and arrangement for stabilizing an arc between an anode and a cathode particularly for vacuum coating devices |
摘要 |
A shield to limit an electric arc discharge between an anode and a cathode to a designated portion of the cathode surface is fashioned in the shape of a limiting ring with good electrically conducting surface, e.g., copper or aluminum, surrounding this surface. Application of the invention, especially with heavy current arc discharges causes the tracing point of the discharge to move stochastically back and forth on the cathode.
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申请公布号 |
US5387326(A) |
申请公布日期 |
1995.02.07 |
申请号 |
US19930007630 |
申请日期 |
1993.01.21 |
申请人 |
BALZERS AG |
发明人 |
BUHL, RAINER;HASLER, CHRISTOPH |
分类号 |
H01J37/32;H05H1/50;(IPC1-7):C23C14/24 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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