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发明名称
SEMICONDUCTOR SUBSTRATE AND ITS MANUFACTURE
摘要
申请公布号
JPH07161948(A)
申请公布日期
1995.06.23
申请号
JP19930310189
申请日期
1993.12.10
申请人
CANON INC
发明人
SAKAMOTO MASARU
分类号
H01L21/20;H01L21/02;H01L27/12;(IPC1-7):H01L27/12
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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