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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07201976(A)
申请公布日期
1995.08.04
申请号
JP19930351868
申请日期
1993.12.28
申请人
NIPPON STEEL CORP
发明人
SATO KAORU
分类号
H01L21/316;H01L21/322;H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/316
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代理人
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