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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0831872(A)
申请公布日期
1996.02.02
申请号
JP19940160934
申请日期
1994.07.13
申请人
HITACHI LTD
发明人
FUJITA YUJI
分类号
H01L21/60;H01L21/321;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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