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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0831842(A)
申请公布日期
1996.02.02
申请号
JP19940163485
申请日期
1994.07.15
申请人
SONY CORP
发明人
SHINOHARA MAMORU
分类号
H01L29/73;H01L21/205;H01L21/316;H01L21/331;H01L21/8249;H01L27/06;H01L29/732;(IPC1-7):H01L21/331;H01L21/824
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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