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发明名称
ION DOPING DEVICE
摘要
申请公布号
JPH0877959(A)
申请公布日期
1996.03.22
申请号
JP19940234039
申请日期
1994.09.01
申请人
NISSIN ELECTRIC CO LTD
发明人
TATEMICHI JUNICHI;KONISHI MASASHI;ONODA MASATOSHI;ANDO YASUNORI
分类号
C30B31/22;C23C14/48;H01J37/317;H01L21/265;H01L21/425;(IPC1-7):H01J37/317
主分类号
C30B31/22
代理机构
代理人
主权项
地址
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