| 摘要 |
The tapered metal electrode is prepared by depositing a metal layer(2) of Cr, Al, Ta or Al alloy and forming an oxide layer(7) on the metal layer by O2 ashing or UV/O3 method; forming a mask pattern of photosensitive layer(3) on the oxide layer; and stripping etching the oxide layer(7) and metal layer(2) by wet etching.
|
