Flüchtiger, flüssiger Vorläufers zum chemischen Dampfphasenabscheiden von Kupfer,申请号DE19926018478T-传众专利搜索

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发明名称	Flüchtiger, flüssiger Vorläufers zum chemischen Dampfphasenabscheiden von Kupfer
摘要
申请公布号	DE69218478(T2)	申请公布日期	1997.07.03
申请号	DE19926018478T	申请日期	1992.01.28
申请人	AIR PRODUCTS AND CHEMICALS, INC., ALLENTOWN, PA., US	发明人	NORMAN, JOHN ANTHONY THOMAS, ENCINITAS, CA 92024, US;MURATORE, BETH ANNE, ELVERSON, PA 19520, US
分类号	C07F7/02;C07F7/08;C23C16/18;(IPC1-7):C07F7/08;C23C16/00	主分类号	C07F7/02
代理机构		代理人
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