发明名称 |
Facility and method for the handling of objects |
摘要 |
PCT No. PCT/DE93/00274 Sec. 371 Date Jul. 28, 1994 Sec. 102(e) Date Jul. 28, 1994 PCT Filed Apr. 2, 1993 PCT Pub. No. WO93/20580 PCT Pub. Date Oct. 14, 1993Facility and method for the production of objects which require clean-room conditions in manufacture, wherein a clean-room area includes a working area (6) and a cleaning area (8), and the receptacles (12) transported into this working area (6) are cleaned by an ionic current.
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申请公布号 |
US5660585(A) |
申请公布日期 |
1997.08.26 |
申请号 |
US19940157026 |
申请日期 |
1994.07.28 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SWOBODA, BRUNO;SCHWARZE, JUERGEN;WILD, INGO |
分类号 |
A61J3/00;B25H1/20;B65B31/00;B65G49/00;C12M1/00;F24F3/16;H01L21/00;H01L21/02;H01L21/677;(IPC1-7):F24F3/16 |
主分类号 |
A61J3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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