发明名称 Facility and method for the handling of objects
摘要 PCT No. PCT/DE93/00274 Sec. 371 Date Jul. 28, 1994 Sec. 102(e) Date Jul. 28, 1994 PCT Filed Apr. 2, 1993 PCT Pub. No. WO93/20580 PCT Pub. Date Oct. 14, 1993Facility and method for the production of objects which require clean-room conditions in manufacture, wherein a clean-room area includes a working area (6) and a cleaning area (8), and the receptacles (12) transported into this working area (6) are cleaned by an ionic current.
申请公布号 US5660585(A) 申请公布日期 1997.08.26
申请号 US19940157026 申请日期 1994.07.28
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 SWOBODA, BRUNO;SCHWARZE, JUERGEN;WILD, INGO
分类号 A61J3/00;B25H1/20;B65B31/00;B65G49/00;C12M1/00;F24F3/16;H01L21/00;H01L21/02;H01L21/677;(IPC1-7):F24F3/16 主分类号 A61J3/00
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