APPARATUS AND METHOD FOR EXPOSURE TO CHARGED BEAM,申请号JP19960074086-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR EXPOSURE TO CHARGED BEAM
摘要
申请公布号	JPH09266152(A)	申请公布日期	1997.10.07
申请号	JP19960074086	申请日期	1996.03.28
申请人	NEC CORP	发明人	AIZAKI HISAAKI
分类号	G03F7/20;H01J37/304;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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