| 发明名称 |
SILICIDED NANOWIRES FOR NANOBRIDGE WEAK LINKS |
| 摘要 |
Silicided nanowires as nanobridges in Josephson junctions. A superconducting silicided nanowire is used as a weak-link bridge in a Josephson junction, and a fabrication process is employed to produce silicided nanowires that includes patterning two junction banks and a rough nanowire from a silicon substrate, reshaping the nanowire through hydrogen annealing, and siliciding the nanowire by introduction of a metal into the nanowire structure. |
| 申请公布号 |
US2016276570(A1) |
申请公布日期 |
2016.09.22 |
| 申请号 |
US201514659749 |
申请日期 |
2015.03.17 |
| 申请人 |
GLOBALFOUNDRIES INC. |
发明人 |
Chang Josephine B.;Chang Paul;Cohen Guy M.;Guillorn Michael A. |
| 分类号 |
H01L39/02;H01L39/24;H01L39/22 |
主分类号 |
H01L39/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for forming a superconducting weak-link junction, the method comprising:
patterning a first junction bank, a second junction bank, and a rough nanowire from a silicon substrate; reshaping the nanowire through hydrogen annealing; and siliciding the nanowire by introduction of a metal into the nanowire; wherein: the nanowire is shaped, sized, structured, located and/or connected to form a weak-link bridge between the first junction bank and the second junction bank. |
| 地址 |
Grand Cayman KY |
