FOCUSED ION BEAM MACHINING DEVICE,申请号JP19970302483-传众专利搜索

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发明名称	FOCUSED ION BEAM MACHINING DEVICE
摘要
申请公布号	JPH11144668(A)	申请公布日期	1999.05.28
申请号	JP19970302483	申请日期	1997.11.05
申请人	HITACHI LTD;HITACHI INSTR ENG CO LTD	发明人	MATSUMOTO HIROAKI;UENO TAKEO;KOIKE HIDEMI
分类号	H01J37/147;H01J37/30;(IPC1-7):H01J37/30	主分类号	H01J37/147
代理机构		代理人
主权项
地址

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