Information processing apparatus having multiprobe control circuit

摘要

An information processing apparatus is provided with a plurality of probes facing a sample, a signal detection circuit, a selection circuit and a memory circuit. The signal detection circuit is selectively connected to the plurality of probes by the selection circuit. A compensation value for compensating a variation in a detection signal detected by the signal detection circuit when the selection circuit connects one of the plurality of proves to the detection circuit is stored in the memory circuit. The compensation value is provided for the respective probe. <IMAGE>