| 发明名称 |
OPENING SYSTEM COMPATIBLE WITH A VERTICAL INTERFACE |
| 摘要 |
A system is described herein including a load port (24) which allows various pod (32) sizes, including 200 mm and 300 mm, and various configurations, including front opening and bottom opening, to operate with a BOLTS interface (22), or simply with a vertical port on the front end of a process tool in configurations not including the BOLTS interface (22).
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| 申请公布号 |
WO0002804(A1) |
申请公布日期 |
2000.01.20 |
| 申请号 |
WO1999US15691 |
申请日期 |
1999.07.12 |
| 申请人 |
ASYST TECHNOLOGIES, INC. |
发明人 |
BONORA, ANTHONY, C.;FOSNIGHT, WILLIAM, J.;MARTIN, RAYMOND, S. |
| 分类号 |
B65G49/00;B65G49/07;H01L21/677;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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