GATE-CONTROLLED ELECTRON EMITTER USING INJECTION PARTICLE FOR RESTRICTING GATE OPENING AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A fabricating method of a gate-controlled electron emitter is provided to make particles restrict a gate opening through a gate layer and form a dielectric opening through an insulating layer through the opening. CONSTITUTION: The method comprises the steps of injecting many particles into a structure, utilizing the particles for restricting a corresponding position for many gate openings extended through an electrical conductive gate layer supplied around an electrical insulating layer in the structure, supplying a spacer material into the gate opening to leave a corresponding aperture extended downwardly toward the insulating layer through a spacer material although generally covering a side end thereof, etching the insulating layer through the aperture to form a dielectric opening, and injecting an electrical conductive emitter material into the dielectric opening to form an electron emitting device.