| 摘要 |
PROBLEM TO BE SOLVED: To make savable the space while a paint film of high quality is formed on a substrate of a large area by holding the substrate in a vertical state by a holding member of a substrate conveying part in feed of the substrate to a substrate placing member of an coating part, and conveyance of the substrate to a drying part from the coating part after coating. SOLUTION: A substrate S is fed to a placing surface 19 of a substrate placing member 17 being at an almost vertical position by being held in a vertical state by a holding member 34 of a substrate conveyance part 31. The substrate placing member 17 transfers the placing surface 19 from an almost vertical position to a specific applicating position (for example, pivot the placed surface 19 so as to make a specific angle of 0-45 deg. to horizontality), and coating of the substrate S is executed by a coating means 12. The substrate S after coating is conveyed from the placing surface 19 of the substrate placing member 17 existing at an almost vertical position to a vacuum chamber 22 of a drying part 21 by being held in a vertical state by the holding member 34 of the substrate conveyance part 31. Thereby, deflextion of the substrate S owing to empty weight can be prevented, and even the substrate S of a large area can be stably conveyed.
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