发明名称 |
CIRCUIT BOARD FOR PROBE CARD AND MANUFACTURE OF CIRCUIT BOARD |
摘要 |
PROBLEM TO BE SOLVED: To cope with the matrix-shaped DUT (an integrated circuit device) in a probe head using a needle monocrystalline as a probe pin. SOLUTION: This circuit board 100 has a surface needle monocrystalline 48 and a second conductor layer 52 on a front surface 26. The surface needle monocrystalline 48 and the second conductor layer 52 are used as a probe pin 56. The second conductor layer 52 is formed on the inner wall part and a peripheral part of a through-hole 16, and a rear surface 26 side of the board, and electrically connected to a bump 68 of a wiring board 60 on a rear surface 27. As it is unnecessary to form the leading wiring on the front surface 26, the probe pin can be arranged in a matrix.
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申请公布号 |
JP2000321302(A) |
申请公布日期 |
2000.11.24 |
申请号 |
JP19990133594 |
申请日期 |
1999.05.14 |
申请人 |
TOKYO CATHODE LABORATORY CO LTD;DENKI KAGAKU KOGYO KK |
发明人 |
TAKAGI HIROYUKI;NAKAJIMA MASAHIKO;MURATA HIROSHI |
分类号 |
H05K3/00;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 |
主分类号 |
H05K3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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