发明名称 CIRCUIT BOARD FOR PROBE CARD AND MANUFACTURE OF CIRCUIT BOARD
摘要 PROBLEM TO BE SOLVED: To cope with the matrix-shaped DUT (an integrated circuit device) in a probe head using a needle monocrystalline as a probe pin. SOLUTION: This circuit board 100 has a surface needle monocrystalline 48 and a second conductor layer 52 on a front surface 26. The surface needle monocrystalline 48 and the second conductor layer 52 are used as a probe pin 56. The second conductor layer 52 is formed on the inner wall part and a peripheral part of a through-hole 16, and a rear surface 26 side of the board, and electrically connected to a bump 68 of a wiring board 60 on a rear surface 27. As it is unnecessary to form the leading wiring on the front surface 26, the probe pin can be arranged in a matrix.
申请公布号 JP2000321302(A) 申请公布日期 2000.11.24
申请号 JP19990133594 申请日期 1999.05.14
申请人 TOKYO CATHODE LABORATORY CO LTD;DENKI KAGAKU KOGYO KK 发明人 TAKAGI HIROYUKI;NAKAJIMA MASAHIKO;MURATA HIROSHI
分类号 H05K3/00;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 H05K3/00
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