| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor invariably securing high measurement precision, reducing the change, deformation, and others of a measurement signal based on thermal expansion to the minimum level, having high reliability and durability, and relatively easy to manufacture at a low cost. SOLUTION: This pressure sensor 1 is used for an extruding machine of a plastic material in particular, a chemical process, and others. The pressure sensor 1 is provided with a support element 3 for a semiconductor chip 5 having a strain gauge 9 on one of opposite faces, a casing 2 suitable to store the support element 3, a cover element 6 provided to close the casing 2, and a mechanical transfer element 8 stored in the cover element 6, faced to the semiconductor chip 5, and kept in contact with the semiconductor chip 5. The semiconductor chip 5 is stored to float in the support element 3.
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