发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device together with its manufacturing method where an electrostatic breakdown-strength is enhanced, even with an SOI-LDMOSFET having a relatively thick SOI film. SOLUTION: A layer 4a near an insulating layer 2 on the lower side of a P-type well region 4, which is not directly involved in device operation, is converted into a low-carrier generation layer, while the remaining P-type well layer 4b is utilized as an effective SOI layer. Thus the carrier generation amount is suppressed as a whole, resulting in enhanced electrostatic breakdown strength.
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申请公布号 |
JP2002110987(A) |
申请公布日期 |
2002.04.12 |
申请号 |
JP20000292269 |
申请日期 |
2000.09.26 |
申请人 |
MATSUSHITA ELECTRIC WORKS LTD |
发明人 |
SHIRAI YOSHIFUMI;SUZUMURA MASAHIKO;SUZUKI YUJI;HAYAZAKI YOSHIKI;KISHIDA TAKASHI;TAKANO KIMIMICHI;YOSHIDA TAKESHI |
分类号 |
H01L27/12;H01L29/786;(IPC1-7):H01L29/786 |
主分类号 |
H01L27/12 |
代理机构 |
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地址 |
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