发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device together with its manufacturing method where an electrostatic breakdown-strength is enhanced, even with an SOI-LDMOSFET having a relatively thick SOI film. SOLUTION: A layer 4a near an insulating layer 2 on the lower side of a P-type well region 4, which is not directly involved in device operation, is converted into a low-carrier generation layer, while the remaining P-type well layer 4b is utilized as an effective SOI layer. Thus the carrier generation amount is suppressed as a whole, resulting in enhanced electrostatic breakdown strength.
申请公布号 JP2002110987(A) 申请公布日期 2002.04.12
申请号 JP20000292269 申请日期 2000.09.26
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 SHIRAI YOSHIFUMI;SUZUMURA MASAHIKO;SUZUKI YUJI;HAYAZAKI YOSHIKI;KISHIDA TAKASHI;TAKANO KIMIMICHI;YOSHIDA TAKESHI
分类号 H01L27/12;H01L29/786;(IPC1-7):H01L29/786 主分类号 H01L27/12
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