| 摘要 |
PROBLEM TO BE SOLVED: To provide a bonding device capable of widening the rotation range of a collet. SOLUTION: A communicating hole 21, penetrating upward and downward, is formed in the spline shaft 13 of a rotary head 12 which is held rotatably. The collet is fixed in the collet attaching hole of the communicating hole 21, and the suction hole of the collet communicates with the communicating hole 21. An attaching recess part 32 is provided on the upper end member 31 of the upper end of the spline shaft 13, and a circular hole 34 communicating with the communicating hole 21 of the spline shaft 13 is formed on a bottom face 33. The inner fitting part 42 of an attaching member 41 having a vacuum joint 62 is inserted in the attaching recess part 32, and a bearing 45 is arranged between the outer peripheral face 43 of the inner fitting part 42 and the inner peripheral face 44 of the attaching recess part 32. An O-ring 54 is interposed between the lower part of the inner ring 51 and the lower part of the outer ring 53 of the bearing 45 for sealing it.
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