| 摘要 |
A method of, and a circuit for, measuring a capacitor gate dielectric thickness. The method comprises the step of providing a circuit including a gate dielectric capacitor, and charging the circuit with a known current. A voltage output from said circuit is measured, and this voltage is proportional to the gate dielectric capacitor thickness. The present invention may be effectively employed to obtain a number of important advantages. First, because the supply voltage scales with gate dielectric thickness, chip performance is maximized, even when gate oxide runs thick. Furthermore, oxide reliability is not affected because a constant electric field is guaranteed.
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