摘要 |
PROBLEM TO BE SOLVED: To resolve problems where line conductors of an input-output terminal composing a semiconductor package cannot be baked with the ceramic based on aluminum oxide of dielectric material for the input-output terminal at the same time, fine ones containing Cu of low resistance cannot be formed with high density, and reflection loss of high frequency signal passing the input-output terminal is significant. SOLUTION: The input-output terminal 5 composing the semiconductor package 1 contains aluminum oxide of 84-90 wt.% and magnesium oxide of 2-6 wt.% as main components, and the line conductors contain copper of 10-70 vol.% and tungsten and/or molybdenum of 30-90 vol.%.
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