发明名称 Thin film magnetic head with recess for positional reference
摘要 In order to provide a thin film magnetic head having a high performance as well as a method of manufacturing the same, in which throat height TH of a pole portion and MR height MRH can be formed accurately to have desired design values for improving a surface recording density and reducing a side fringe magnetic flux during a writing, an MR film is formed such that the film is embedded in a shield gap layer formed on a substrate, a first magnetic layer is formed on the shield gap layer, a thin film coil, is formed on the first magnetic layer such that the coil is isolated by an insulating layer, and a second magnetic layer is formed in accordance with a given pattern. The gap layer is selectively removed by an anisotropic etching in the vicinity of side walls of a pole portion of the second magnetic layer, and then the first magnetic layer is partially removed by an ion milling to form recesses having an inner side wall which serves as a positional reference. An air bearing surface is polished on the basis of a position of this inner side wall of the recess.
申请公布号 US6490130(B2) 申请公布日期 2002.12.03
申请号 US20010826837 申请日期 2001.04.06
申请人 TDK CORPORATION 发明人 SASAKI YOSHITAKA;IIJIMA ATSUSHI
分类号 G11B5/265;G11B5/31;G11B5/39;(IPC1-7):G11B5/187 主分类号 G11B5/265
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