| 摘要 |
Provided is a soaking apparatus to treat materials which require higher accuracy in soaking and improved cleanliness. The soaking apparatus to soak a material 12 to be treated is provided with a heat treatment apparatus 14 having walls, a ceiling and a floor, each of the walls, the ceiling and the floor of the heat treatment apparatus 14 being divided into a plurality of sections, a heater block mounted on each of the sections, a thermal sensor 11 mounted to the heater block, and a thermal controller 13 to control heating of the heater block based on a temperature measured by the thermal sensor 11.
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