CHUCKING TABLE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a chucking table capable of preventing an electronic device from electrostatically being charged and a method for manufacturing the electronic device. SOLUTION: The chuck table 10 comprising a chucking plate stage 2 and a chucking plate arranged on its surface has an antistatic layer formed on the surface of the chuck plate 3 that at least an insulating substrate comes into contact with, the antistatic layer being made of silicon carbide (SiC). COPYRIGHT: (C)2004,JPO