| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator unit mounted with a linear motor which is easy of manufacture and where the drop of efficiency of a linear motor caused by an error in manufacture is little. SOLUTION: This actuator unit has a supporting arm 4 which supports a moving member 1 driven by stators 2 and 2 in cantilever state to a slider 5 slidable on a fixed track rail 6. The assembly and tuning of the actuator unit can be simplified, and the yield in manufacture and the throughput can be enhanced. Then, for parts which constitute the actuator unit excluding the linear motor, the ones lower in accuracy than conventional ones can be used. Therefore, the manufacture cost can be reduced. Furthermore, as compared with conventional ones, the efficiency of the linear motor can be enhanced since there is no factor referring to the increase of sliding resistance caused by the error of parallelism of track rails, vertical level, etc. COPYRIGHT: (C)2004,JPO
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