| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration-free base device (so-called soft vibration-free base device) provided with extremely excellent vibration-free performance in the either of vertical and horizontal directions in which the natural frequency can be set small (especially in the horizontal direction) while restricting the generation of rolling, yawing, or pitching. SOLUTION: This device has a floating part provided with a top plate to directly or indirectly get in contact with a subject, and a fixed part connected to the float part through vertical bellows. The floating part has a float function part that is substantially fixed to an upper side part of the vertical bellows, and the float function part is provided with a suspension body that is suspended. The fixed part is provided with an upward extension body extended upward along a center axial direction of the vertical bellows. The suspension body and the upward extension body are combined with each other in such a way that one covers the other to be capable of forming mutually facing surfaces having a prescribed interval to each other. At least either of the suspension body and the upward extension body is disposed to get into the vertical bellows. In the interval between the mutually facing surfaces of the suspension body and the upward extension body, a diaphragm that is actuated substantially in horizontal directions is provided. COPYRIGHT: (C)2004,JPO&NCIPI |
