METHOD FOR FABRICATING PHOTO CRYSTAL CIRCUIT

摘要

PURPOSE: A method for fabricating a photo crystal circuit is provided to form easily the patterned photo crystal circuit by pressing a stamp having a desired pattern on a polymer layer of a substrate. CONSTITUTION: A stamp fabrication process is performed. In the stamp fabrication process, a stamp(100) is carved by a nano scale. A polymer layer(110) is pressed by using the stamp. A pattern of the stamp is printed on the polymer layer by pressing the stamp on the polymer layer. An etching process is performed by using the patterned polymer layer. A photo crystal circuit having a desired pattern is formed by performing the etching process. In the stamp fabrication, the stamp is fabricated by using an electron beam lithography method.